Ultrapure Water

The specifications for Ultrapure water quality have become increasingly stringent over the years and the filter technology has evolved to meet these requirements. Semiconductor facilities can utilize ultrapure water at a rate of 2 MGD or ~5500 m3/day. The specifications for ultrapure water for the semiconductor industry are the most stringent. These water factories are usually stand-alone facilities operated almost independently from the Fab. Water must meet both particle and conductivity specifications, requiring the use of reverse osmosis, resin beds as well as mechanical filtration technologies. Final filters rated below 0.1 microns are typical before sending water to the Fab, where the point of use filters of similar ratings may be found.